Gelest is the industry leader in synthesis and manufacturing of precursors for CVD and ALD silicon nitride. Offering custom designed silicon precursors to provide critical advantages in CVD and ALD.
Precursor Features:
- Gas or liquid state with high vapor pressure
- High thermal stability and good chemical integrity
- High reactivity with ability to undergo rapid and clean decomposition
Precursor Benefits:
- Ensures accuracy and control in transport and delivery into the ALD or CVD processing chamber
- Strong resiliency to breakdown during storage, transport, and delivery into the deposition reactor
- Clean elimination of unwanted ligands and undesirable attachments lead to high purity SiN
- Requires low activation energy in the presence of ammonia or nitrogen-hydrogen to yield pure SiN without the need for plasma activation
Industry Leader With Expert Capabilities
- Vertically-integrated leader in synthesis, manufacturing and supply of precursors
- High volume production with Ship-To-Control quality management
- Precursors packaged in leak and spill-proof vessels tailored to clients specifications
- A fully integrated on-site demonstration laboratory for proof of concept work and joint development projects with clients
- In-house competencies provide critical data for functionality links between precursor structure, processing parameters and resulting film properties 1,2
1. Kaloyeros, A. et al ECS Journal of Solid State Science and Technology, 6(10) P691-P714 (2017)
2. Arkles, B. et al Solid State Technologies, January/February 2018, pg 22-24
Perhydridosilanes for ALD and CVD
| SKU | Image | Name | Molecular Weight | Form | Vapor_Pressure_1_mm | Boiling Point (°C / mm Hg) | Melting Point (°C) | Density |
|---|---|---|---|---|---|---|---|---|
| SIS6950.4 |
|
SILANE, 7.0 - 7.5% in nitrogen | 32.12 | gas | -- | -112 | -185° | 0.680 |
| SID4594.0 |
|
DISILANE, 99.9+% | 62.22 | gas | -- | -14.5 | -132° | 0.686 |
| SIT8709.6 |
|
TRISILANE | 92.32 | liquid | -- | 52.9 | -117° | 0.7430 |
| SIT7880.0 |
|
n-TETRASILANE | 122.42 | liquid | -- | 107 | -85 to -95° | 0.825 |
| SII6463.4 |
|
ISOTETRASILANE | 122.42 | liquid | -- | 101 | -99° | 0.793 |
| SIN6597.07 |
|
NEOPENTASILANE | 152.52 | liquid | -- | 132-134 | -- | 0.805 |
Hydridohalosilanes for ALD and CVD
| SKU | Image | Name | Molecular Weight | Form | Vapor_Pressure_1_mm | Boiling Point (°C / mm Hg) | Melting Point (°C) | Density |
|---|---|---|---|---|---|---|---|---|
| SIC2414.0 |
|
CHLOROSILANE, 95% | 66.56 | gas | -- | -30.4 | -118° | 1.145 |
| SID3368.0 |
|
DICHLOROSILANE | 101.01 | gas | -- | 8.3 | -122° | 1.22 |
| SID3520.1 |
|
DIIODOSILANE, 99% | 283.91 | liquid | -- | NA | -1° | -- |
| SIT8378.56 |
|
TRIIODOSILANE | 409.81 | liquid | -- | 94-95/12 | -- | 3.314 |
Halosilanes for ALD and CVD
| SKU | Image | Name | Molecular Weight | Form | Vapor_Pressure_1_mm | Boiling Point (°C / mm Hg) | Melting Point (°C) | Density |
|---|---|---|---|---|---|---|---|---|
| SIT7085.1 |
|
TETRACHLOROSILANE, 99.99+% | 169.90 | liquid | -- | 57.6 | -70° | 1.481 |
| SIH5905.1 |
|
HEXACHLORODISILANE, 99.9% | 268.89 | liquid | -- | 144-146 | -1° | 1.562 |
| SIO6601.0 |
|
OCTACHLOROTRISILANE, 96% | 367.88 | liquid | -- | 213-215 | -67° | 1.61 |
| SIT7050.0 |
|
TETRABROMOSILANE | 347.70 | liquid | -- | 154 | 5° | 2.772 |
| SIT7123.0 |
|
TETRAIODOSILANE | 535.70 | solid | -- | 287-288 | 120-1° | 4.198 |
Aminosilanes for CVD and ALD
| SKU | Image | Name | Molecular Weight | Form | Vapor_Pressure_1_mm | Boiling Point (°C / mm Hg) | Melting Point (°C) | Density |
|---|---|---|---|---|---|---|---|---|
| SIT8715.8 |
|
TRISILYLAMINE | 107.33 | liquid | -- | 52 | -106° | 0.895 |
| SIB1069.0 |
|
BIS(DIETHYLAMINO)SILANE | 174.16 | liquid | -- | 70/30 | -- | 0.804 |
| SID2795.0 |
|
DI(t-BUTYLAMINO)SILANE | 174.36 | liquid | -- | 167 | -- | 0.816 |
| SIT8714.0 |
|
TRIS(DIMETHYLAMINO)SILANE | 161.32 | liquid | -- | 145-148 | -90° | 0.838 |
| SIT8715.82 |
|
TRIS(ISOPROPYLAMINO)SILANE | 203.4 | liquid | 1 mm | 185-186 | -- | 0.85 |
| SIT7276.0 |
|
TETRAKIS(DIMETHYLAMINO)SILANE | 204.39 | liquid | -- | 74-75/19 | 16° | 0.8851 |
| SIT8384.2 |
|
1,3,5-TRIISOPROPYLCYCLOTRISILAZANE | 261.59 | liquid | -- | 67/1.6 | -- | 0.919 |
| SIT7542.0 |
|
1,1,3,3-TETRAMETHYLDISILAZANE | 133.34 | liquid | -- | 99-100 | -- | 0.766 |